Energy-filtering transmission electron microscope (JEM2010FEF)

The microscope images and diffraction patterns obtained by usual transmission electron microscopes contain elastically- and inelastically-scattered electrons. Inelastically- scattered electrons are harmful for the quantitative analysis of diffraction patterns and smear out fine structures of the images in thick specimen areas.

Our new microscope has a built-in energy filter (omega filter) in the image forming lens system. Using this microscope, energy-selected electron diffraction patterns and microscope images can be obtained. Zero-loss diffraction patterns including higher-order Laue-zone reflections enable us accurate crystal structure analysis of various materials in nanometer areas. Zero-loss images show sharp contrast even in thick specimen areas. Chemical- and elemental-mapping images are obtained by setting the energy selecting window to pass a specific energy-loss electrons.

Omega-type energy filter

Energy-filtered CBED pattern of Al[100]

Convergent-beam electron diffraction patterns of Al taken at [100] electron incidence. (Upper) With energy-filtering. (Lower) Without energy-filtering.

Energy-filtered CBED pattern of BN[110]

Convergent-beam electron diffraction patterns of cubic-BN taken at [110] electron incidence. (Left) Without energy-filtering. (Right) With energy-filtering

Acceptance angle

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