新しい論文が掲載されました。
Masayoshi Adachi, Keigo Fujiwara, Ryuta Sekiya, Hidekazu Kobatake, Makoto Ohtsuka, Hiroyuki Fukuyama
In situ observations of the dissolution of an AlN film into liquid Al using a high-temperature microscope
Materials Science in Semiconductor Processing, 142, 106469, (2022)
https://doi.org/10.1016/j.mssp.2022.106469
